A desktop extreme ultraviolet microscope based on a compact laser-plasma light source-Reference-Cited by-同舟云学术

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A desktop extreme ultraviolet microscope based on a compact laser-plasma light source

Published:2016-12-24 Issue:1 Volume:123 Page:
ISSN:0946-2171
Container-title:Applied Physics B
language:en
Short-container-title:Appl. Phys. B

Author:

Wachulak P. W.,Torrisi A.,Bartnik A.,Węgrzyński Ł.,Fok T.,Fiedorowicz H.

Funder

Narodowe Centrum Badań i Rozwoju

Narodowe Centrum Nauki

Education, Audiovisual and Culture Executive Agency

Laserlab-Europe IV

Publisher

Springer Science and Business Media LLC

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://link.springer.com/content/pdf/10.1007/s00340-016-6595-5.pdf

Reference29 articles.

1. ISO International Standard 21348

2. D. Attwood, Soft X-Rays and Extreme Ultraviolet Radiation (Cambridge University, Cambridge, 1999)

3. M.C. Marconi, P.W. Wachulak, Prog. Quantum Electron. 34(4), 173–190 (2010)

4. M.P. Benk, K. Goldberg, A. Wojdyla, C.N. Anderson, F. Salmassi, P. Naulleau, M. Kocsis, J. Vac. Sci. Technol. B 33(6), 06FE01 (2015)

5. W. Chao, P. Fischer, T. Tyliszczak, S. Rekawa, E. Anderson, P. Naulleau, Opt. Express 20(9), 9777–9783 (2012)

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