1. Metrology of optically-unresolved features using interferometric surface profiling and RCWA modeling
2. Modelling of coherence scanning interferometry for complex surfaces based on a boundary element method;Thomas,2019
3. Transfer characteristics of optical profilers with respect to rectangular edge and step height measurement;Xie,2017
4. Holography, tomography and 3D microscopy as linear filtering operations
5. High-accuracy surface measurement through modelling of the surface transfer function in interference microscopy;Su,2019