Next-generation test equipment for micro-production-Reference-Cited by-同舟云学术

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Next-generation test equipment for micro-production

Published:2010-04-30 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Gastinger Kay,Johnsen Lars,Kujawinska Malgorzata,Jozwik Michal,Zeitner Uwe,Dannberg Peter,Albero Jorge,Bargiel Sylwester,Schaeffel Christoph,Beer Stephan,Moosburger Rudolf,Lambelet Patrick,Pizzi Marco

Publisher

SPIE

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Finding the Needle in the Haystack - Approaches for Detecting Small Defects on a Large Object;Imaging and Applied Optics;2013

3. Genetic programming applied to automatic algorithm design in multi-scale inspection systems;Optical Engineering;2012-06-05

4. A control system for automated multiscale measuring systems;Mechatronics;2012-04

5. Measuring MEMS vibration with novel quasi-heterodyned laser interferometry;AIP Conference Proceedings;2012

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