Optical profiler based on spectrally resolved white light interferometry
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference19 articles.
1. An Application Of Interference Microscopy To Integrated Circuit Inspection And Metrology
2. Profilometry with a coherence scanning microscope
3. Mirau correlation microscope
4. Three-dimensional sensing of rough surfaces by coherence radar
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