Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices-Reference-Cited by-同舟云学术

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Micromachining of InP/InGaAs multiple membrane/airgap structures for tunable optical devices

Published:2008-04-25 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Kusserow T.,Ferwana S.,Nakamura T.,Hayakawa T.,Dharmarasu N.,Vengatesan B.,Hillmer H.

Publisher

SPIE

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Micro-transfer-printing of InP Photonic Devices to Silicon Photonics;2019 PhotonIcs & Electromagnetics Research Symposium - Spring (PIERS-Spring);2019-06

2. Transfer Printing for Silicon Photonics;Semiconductors and Semimetals;2018

3. Comparison of InGaAs and InAlAs sacrificial layers for release of InP-based devices;Optical Materials Express;2017-11-21

4. Silicon photonics fiber-to-the-home transceiver array based on transfer-printing-based integration of III-V photodetectors;Optics Express;2017-06-13

5. Transfer Printing of AlGaInAs/InP Etched Facet Lasers to Si Substrates;IEEE Photonics Journal;2016-12

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