1. Lithography alignment method based on image rotation matching;Journal of Physics: Conference Series;2021-05-01
2. An Impedance-Based Force Control Scheme to a Plate-to-Plate Nanoimprinter;IEEE Transactions on Nanotechnology;2016-03
3. Moiré fringe alignment using composite circular-line gratings for proximity lithography;Optics Express;2015-07-31
4. Positioning scheme based on grating modulation and phase imaging in lithography;5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems;2010-05-13