Author:
Brown Alan G.,Frommhold Andreas,Lada Tom,Bowen J.,el Otell Z.,Robinson Alex P. G.
Reference9 articles.
1. Plasma Etching of High-resolution Features in a Fullerene Molecular Resist,;Manyam,2011
2. High aspect ratio contact hole etching using relatively transparent amorphous carbon hard mask deposited from propylene
3. Investigation of pattern wiggling for spin-on organic hardmask materials,;Wakamatsu,2012
4. Systematic Studies on Reactive Ion Etch-Induced Deformations of Organic Underlayers,;Glodde,2011
5. www.itrs.net
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