1. Proceeding of the IEEE/SEMI Advanced Semiconductor Manufacturing Conference, Stresa, Italy;Hwang,2007
2. ITRS (International Technology Roadmap for Semiconductors), http://www.itrs.net, 2005
3. IEEE Non-Volatile Semiconductor Memory Workshop, Monterey, CA., U.S.A;Kim,2006
4. IEEE International Electron Devices Meeting, San Francisco, CA., U.S.A;Park,2004
5. Ar dilution effects on the elastic properties of hydrogenated amorphous hard-carbon films grown by plasma-enhanced chemical vapor deposition