Scanning probe lithography approach for beyond CMOS devices-Reference-Cited by-同舟云学术

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Scanning probe lithography approach for beyond CMOS devices

Published:2013-03-26 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Alternative Lithographic Technologies V
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Author:

Durrani Zahid,Jones Mervyn,Kaestner Marcus,Hofer Manuel,Guliyev Elshad,Ahmad Ahmad,Ivanov Tzvetan,Zoellner Jens-Peter,Rangelow Ivo W.

Publisher

SPIE

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