1. ITRS: International Technology Roadmap For Semiconductors 2012 Update 2012 Tables, http://www.itrs.net/Links/2012ITRS/Home2012.htm
2. Future of Memory Devices and EUV lithography;Kim,2009
3. Mask Contribution to Intra-Field Wafer Overlay;Chou,2014
4. Proximity Corrected Accurate In-Die Registration Metrology;Daneshpanah,2014
5. Reality check: Understanding the real mask contribution to intra-field overlay;Roeth,2015