Highly efficient deterministic polishing using a semirigid bonnet

Author:

Wang Chunjin1,Yang Wei2,Wang Zhenzhong2,Yang Xu1,Sun Zhiji1,Zhong Bo3,Pan Ri2,Yang Ping2,Guo Yinbiao2,Xu Qiao4

Affiliation:

1. Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, ChinabChina Academy of Engineering Physics, Research Center of Laser Fusion, Mianyang 621900, China

2. Xiamen University, Department of Mechanical and Electrical Engineering, Xiamen 361005, China

3. Fine Optical Engineering Research Center, Chengdu 610041, China

4. China Academy of Engineering Physics, Research Center of Laser Fusion, Mianyang 621900, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

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