Flat-top distribution of excimer laser using ultrasonic grating
Author:
Affiliation:
1. Guangdong University of Technology, School of Physics and Optoelectronic Engineering, Guangzhou 510006, China
2. South China Normal University, MOE Key Laboratory of Laser Life Science and Institute of Laser Life Science, Guangzhou, 510631, China
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference15 articles.
1. Pulsed laser deposition using diffractively shaped excimer-laser beams
2. Excimer-laser-based multifunctional patterning systems for optoelectronics, MEMS, materials processing, and biotechnology
3. Large-area, high-speed patterning of carbon nanotubes using material-assisted excimer laser photoablation
4. Frequency tunable electromagnetic metamaterial based on mechanical movement method
5. Diffractive shaping of excimer laser beams
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