Large area precision optical coatings by pulse magnetron sputtering-Reference-Cited by-同舟云学术

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Large area precision optical coatings by pulse magnetron sputtering

Published:2017-05-11 Issue: Volume: Page:
ISSN:0277-786X
Container-title:Advanced Optics for Defense Applications: UV through LWIR II
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Author:

Frach Peter¹,Gloess Daniel¹,Goschurny Thomas¹,Drescher Andy¹,Hartung Ullrich¹,Bartzsch Hagen¹,Heisig Andreas²,Grune Harald²,Leischnig Lothar³,Leischnig Steffen³,Bundesmann Carsten⁴

Affiliation:

1. Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl-und Plasmatechnik FEP (Germany)

2. Von Ardenne Anlagentechnik GmbH (Germany)

3. LSA GmbH (Germany)

4. Leibniz-Institut für Oberflächenmodifizierung e.V. (Germany)

Publisher

SPIE

Reference5 articles.

1. Reactive Magnetron Sputter Technologies for Precision Optical Coatings

2. Bartzsch, H., Frach, P., Weber, J., Liebig, J.-S., “Precision optical and antireflection multilayers and gradient coatings containing reactively sputtered oxides, nitrides and fluorides”, Proc. of SPIE Vol. 5963 59631B-3.

3. Precision Optical Coatings on Large Substratesby Reactive Magnetron Sputtering;Frach,2016

4. Adjustment of plasma properties in magnetron sputtering by pulsed powering in unipolar/bipolar hybrid pulse mode

5. Process Control in Sputtering of Optical Coatings;Frach,2011

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. IN-LINE SPUTTERING COATER OF HYDROPHOBIC ANTIREFLECTION COATING FOR SENSOR DISPLAYS;Doklady BGUIR;2019-12-07

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