1. A study on the automation of scanner matching;He,2013
2. Scanner-to-scanner CD analysis and control in an HVM environment;Beak,2017
3. Impact of topographic mask models on scanner matching solutions;Tyminski,2014
4. Scanner matching using pupil intensity control between scanners in 30 nm DRAM devices;Jang,2011
5. CD error caused by aberration and its possible compensation by optical proximity correction in extreme-ultraviolet lithography;Hwang,2017