Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Advanced low-complexity compression for maskless lithography data
2. Lossless compression techniques for maskless lithography data
3. V. Dai , “Binary lossless layout compression algorithms and architectures for direct-write lithography systems,” MS Thesis, Department of Electrical Engineering and Computer Sciences, University of California–Berkeley; see 〈http://www-video.eecs.berkeley.edu/papers/vdai/ms-thesis.pdf〉 (2000).
4. Lossless layout compression for maskless lithography systems
5. Reduced complexity compression algorithms for direct-write maskless lithography systems