1. Microlithography
2. Latest developments on immersion exposure systems;Levinson,2008
3. Simulated and experimental study of laser-beam-induced thermal aberrations in precision optical systems
4. Advanced wavefront engineering for improved imaging and overlay applications on a 1.35 NA immersion scanner;Dusa,2011
5. An aberration control of projection optics for multi-patterning lithography;Dusa,2011