Author:
Lee Sang Hee,Choi Jin,Lee Ho June,Shin In Kyun,Tamamushi Shuichi,Jeon Chan-Uk
Cited by
3 articles.
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1. Thermal analysis with high accuracy of multi-beam mask fabrication;Journal of Vacuum Science & Technology B;2024-04-25
2. Impact of parallelism on data volumes for a multibeam mask writer;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
3. A parallel multibeam mask writing method and its impact on data volumes;32nd European Mask and Lithography Conference;2016-10-20