Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference24 articles.
1. G. K. Fedder , “MEMS fabrication,”Proc. Intl. Test Conf., pp. 691–698 (2003).
2. Micromachining for Microelectromechanical Systems
3. J. V. Clark, D. Garmire, M. Last, J. Demmel, and S. Govindjee , “Practical techniques for measuring MEMS properties,”Proc. Nano. Conf.1, 402–405 (2004).
4. M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
5. W. N. Sharpe, B. Yuan, R. Vaidyanathan, and R. L. Edwards , “Measurements of Young’s modulus, Poisson’s ratio and tensile strength of polysilicon,”Proc. Tenth IEEE Intl. Workshop Microelectromech. Syst., pp. 424–429 (1997).
Cited by
10 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献