Author:
Satheesh S.M.,Banerjee Anuradha,Bhattacharya Enakshi
Funder
Department of Electronics and Information Technology, India
Subject
Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials
Reference30 articles.
1. Fracture tests of polysilicon film;Sharpe;MRS Symp. Proc.,1997
2. Fracture Toughness and Fatigue Investigations of Polycrystalline Silicon;Bagdahn,2001
3. Fracture toughness of polysilicon MEMS devices;Kahn;Sensors Actuators A Phys.,2000
4. Mode I and mixed mode fracture of polysilicon for MEMS;Cho;Fatigue Fract. Eng. Mater Struct.,2007
5. Effect of surface morphology on the fracture strength of silicon nanobeams;Alan;Appl. Phys. Lett.,2006
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献