Robust determination of asymmetric side wall angles by means of coherent scanning Fourier scatterometry

Author:

Gödecke M. L.,Peterhänsel S.,Frenner K.,Osten W.

Publisher

SPIE

Reference23 articles.

1. “International technology roadmap for semiconductors,” http://www.itrs.net.

2. Sidewall angle measurements using CD SEM;Su,1998

3. Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval;Price,2003

4. Method for imaging sidewalls by atomic force microscopy

5. Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Analytical calculation on the determination of steep side wall angles from far field measurements;Journal of Optics;2018-04-25

2. Detection of grating asymmetries by phase-structured illumination;Fifth International Conference on Optical and Photonics Engineering;2017-06-13

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