Author:
Gödecke M. L.,Peterhänsel S.,Frenner K.,Osten W.
Reference23 articles.
1. “International technology roadmap for semiconductors,” http://www.itrs.net.
2. Sidewall angle measurements using CD SEM;Su,1998
3. Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval;Price,2003
4. Method for imaging sidewalls by atomic force microscopy
5. Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
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