Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing-Reference-Cited by-同舟云学术

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Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing

Published:1998-10-13 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Hetherington Dale L.,Sniegowski Jeffry J.

Publisher

SPIE

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Reactive Liquids for Non–Prestonian Chemical Mechanical Polishing of Polysilicon Films;ECS Journal of Solid State Science and Technology;2019

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