Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror-Reference-Cited by-同舟云学术

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Investigation of Optical Flatness of Stretched Membrane Drum-Type Micromirror

Published:2012-05 Issue:10 Volume:30 Page:1377-1385
ISSN:0733-8724
Container-title:Journal of Lightwave Technology
language:
Short-container-title:J. Lightwave Technol.

Author:

Kundu Subrata Kumar,Hikita Akiyoshi,Kumagai Shinya,Sasaki Minoru

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Atomic and Molecular Physics, and Optics

Link

http://xplorestaging.ieee.org/ielx5/50/6176017/06144682.pdf?arnumber=6144682

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stiffness-Tunable Microstructures Based on Electrothermal Bimorph Beams;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25

2. Large area and broadband semi-reflective Bragg mirror membrane manufactured by PECVD;Journal of Micromechanics and Microengineering;2013-06-24

3. Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving;Sensors and Actuators A: Physical;2013-06

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