New CD-SEM metrology method for the side wall angle measurement using multiple detectors-Reference-Cited by-同舟云学术

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New CD-SEM metrology method for the side wall angle measurement using multiple detectors

Published:2011-04-29 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
language:
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Author:

Fukaya Hiroshi,Murakawa Tsutomu,Shida Soichi,Kuribara Masayuki,Iwai Toshimichi,Matsumoto Jun,Nakamura Takayuki,Hakii Hidemitsu,Yonekura Isao,Kawashita Masashi,Nishiyama Yasushi,Tanaka Keishi,Kikuchi Yasutaka

Publisher

SPIE

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure;Measurement Science and Technology;2024-04-02

2. Determination of steep sidewall angle using polarization-sensitive asymmetric scattering;Measurement Science and Technology;2021-05-17

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