Nanoscale fabrication by interferometric lithography
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SPIE
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Contrast analysis in two-beam laser interference lithography;Applied Optics;2020-06-12
2. Stress-directed compositional patterning of SiGe substrates for lateral quantum barrier manipulation;Applied Physics Letters;2015-08-17
3. Experimental and theoretical investigation of thermal stress relief during epitaxial growth of Ge on Si using air-gapped SiO2 nanotemplates;Applied Physics Letters;2011-10-31
4. Monitoring FET flow control and wall adsorption of charged fluorescent dye molecules in nanochannels integrated into a multiple internal reflection infrared waveguide;Lab Chip;2008
5. Selective growth of Ge on Si(100) through vias of SiO2 nanotemplate using solid source molecular beam epitaxy;Applied Physics Letters;2003-12-15
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