Author:
Frank Marcus,Kaiser Norbert,Buss Wolfgang,Eberhardt Ramona,Fritzsch Uwe,Kriegel Bernd,Mollenhauer Olaf,Roeder R.,Woldt G.
Cited by
1 articles.
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1. MEMS modular packaging and interfaces;2000 Proceedings. 50th Electronic Components and Technology Conference (Cat. No.00CH37070);2000