Lithographic performance of resist ma-N 1402 in an e-beam/i-line stepper intra-level mix and match approach
Author:
Publisher
SPIE
Reference9 articles.
1. Fabrication of sub-100 nm patterns in SiO2 templates by electron-beam lithography for the growth of periodic III–V semiconductor nanostructures
2. Mix-and-match lithography and cryogenic etching for NIL template fabrication
3. Improved Electron-Beam/Deep-Ultraviolet Intralevel Mix-and-Match Lithography with 100 nm Resolution
4. Electron beam / DUV intra-level mix-and-match lithography for random logic 0.25μm CMOS
5. Hybrid lithography: The marriage between optical and e-beam lithography. A method to study process integration and device performance for advanced device nodes
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3