Author:
Kawata Mitsuhiro,Takada Akira,Hayashi Hideaki,Sugimoto Naoki,Kikugawa Shinya
Cited by
4 articles.
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1. Super-polished metallic freeform optics for EUV-application;Optical and EUV Nanolithography XXXVII;2024-04-10
2. Evidence of speckle in extreme-UV lithography;Optics Express;2012-11-02
3. Next-generation lithography for 22 and 16 nm technology nodes and beyond;Science China Information Sciences;2011-05
4. Extreme ultraviolet lithography: A review;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2007