Development of electron beam lithography for nanoscale devices
Author:
Zlobin Vladimir A.
Cited by
3 articles.
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1. Integrated Micromachining Technologies for Transducer Fabrication;Functional Thin Films and Nanostructures for Sensors;2009
2. Electron beam nanolithography and testing: ways of increasing the resolution and the throughput;SPIE Proceedings;2008-04-25
3. Unconventional methods for forming nanopatterns;Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems;2006-09-01