Hotspot prevention and detection method using an image-recognition technique based on higher-order local autocorrelation-Reference-Cited by-同舟云学术

Hotspot prevention and detection method using an image-recognition technique based on higher-order local autocorrelation

Published:2014-02-06 Issue:1 Volume:13 Page:011007
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Nosato Hirokazu¹,Sakanashi Hidenori¹,Takahashi Eiichi¹,Murakawa Masahiro¹,Matsunawa Tetsuaki²,Maeda Shimon²,Tanaka Satoshi²,Mimotogi Shoji²

Affiliation:

1. Information Technology Research Institute, National Institute of Advanced Industrial Science and Technology (AIST), AIST Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

2. Toshiba Corporation Semiconductor & Storage Products Company 1, Lithography Process Development Group 1, Lithography Process Technology Department, Center for Semiconductor Research & Development, Komukai Toshiba-Cho, Saiwai-Ku, Kawasaki 212-8583, Japan

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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