基于预训练VGG11模型的光刻坏点检测方法
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Published:2023
Issue:3
Volume:43
Page:0312008
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ISSN:0253-2239
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Container-title:Acta Optica Sinica
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language:en
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Short-container-title:光学学报
Author:
Liao Lufeng 廖陆峰,Li Sikun 李思坤,Wang Xiangzhao 王向朝
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials