Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers-Reference-Cited by-同舟云学术

Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers

Published:2014-03-13 Issue:1 Volume:13 Page:011116
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Morley Michael L.¹,Velicu Silviu¹,Chang Yong²,Grein Christoph H.³,Kozak Dmitry A.⁴,Fernandez Bautista⁵,Kubby Joel⁶,Gupta Neelam⁷

Affiliation:

1. EPIR Technologies, Inc., 590 Territorial Drive Unit B, Bolingbrook, Illinois 60440

2. Sivananthan Laboratories, Inc., 590 Territorial Drive Suite H, Bolingbrook, Illinois 60440

3. Sivananthan Laboratories, Inc., 590 Territorial Drive Suite H, Bolingbrook, Illinois 60440cUniversity of Illinois at Chicago, Department of Physics, 845 West Taylor Street #2236, Chicago, Illinois 60607

4. Naval Research Laboratory, Photonics Technology Branch, 4555 Overlook Avenue SW, Washington, DC 20375

5. Naval Postgraduate School, Spacecraft Research and Design Center, 1 University Circle Monterey, California 93943

6. University of California Santa Cruz, Department of Electrical Engineering, 1156 High Street, Santa Cruz, California 95064

7. U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Optical detection of chemical warfare agents and toxic industrial chemicals: Simulation

2. Effect of process parameters on the surface morphology and mechanical performance of silicon structures after deep reactive ion etching (DRIE)

3. Approximate calculation of the reflection coefficient from a stratified medium

4. Composition and thickness distribution of HgCdTe molecular beam epitaxy wafers by infrared microscope mapping

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