Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss-Reference-Cited by-同舟云学术

Fabrication of multilayered SU8 structure for terahertz waveguide with ultralow transmission loss

Published:2014-01-06 Issue:1 Volume:13 Page:013002
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Tian Yingtao¹,Shang Xiaobang²,Lancaster Michael J.²

Affiliation:

1. University of Birmingham, School of Electronic, Electrical and Computer Engineering, Birmingham B15 2TT, United KingdombUniversity of Manchester, School of Materials, Manchester M13 9PL, United Kingdom

2. University of Birmingham, School of Electronic, Electrical and Computer Engineering, Birmingham B15 2TT, United Kingdom

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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