1. The use of cross-validation for overlay model selection;38th European Mask and Lithography Conference (EMLC 2023);2023-10-05
2. Necessity is the mother of invention: support vector machines for CD control;35th European Mask and Lithography Conference (EMLC 2019);2019-08-29
3. Deal gently with the bird you are trying to catch: small scale CD control with machine learning;Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology;2019-06-27
4. Machine learning methods applied to process qualification;34th European Mask and Lithography Conference;2018-09-19