Author:
Johnson Donald W.,Mack Chris A.
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. New approach of rim phase-shifting mask for high-density circuit layout;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-11
2. Wavefront Engineering for Photolithography;Physics Today;1993-07