Wavefront Engineering for Photolithography
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://physicstoday.scitation.org/doi/pdf/10.1063/1.881357
Reference15 articles.
1. There's plenty of room at the bottom [data storage]
2. I-line, DUV, VUV, or x ray?
3. Improving resolution in photolithography with a phase-shifting mask
4. Improved resolution of an i-line stepper using a phase-shifting mask
5. Issues associated with the commercialization of phase-shift masks
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