Precision calibration and systematic error reduction in the long trace profiler
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference18 articles.
1. Design Of A Long Trace Surface Profiler
2. The penta‐prism LTP: A long‐trace‐profiler with stationary optical head and moving penta prisma)
3. Measurement of x‐ray telescope mirrors using a vertical scanning long trace profiler
4. Vertical scanning long trace profiler: a tool for metrology of x-ray mirrors
5. In situ surface profiler for high heat load mirror measurement
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3. Research progress of high-precision surface metrology of a K-B mirror;Chinese Optics;2020
4. Correlation methods in optical metrology with state-of-the-art x-ray mirrors;Thirteenth International Conference on Correlation Optics;2018-01-18
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