1. Cramming more components onto integrated circuits,;Moore,1965
2. Technology interdependence and the evolution of semiconductor lithography,;Kapoor,2007
3. Lithography and photoablation systems for microelectronics and optoelectronics: importance of laser beam shaping in system design,;Jain,2002
4. Principles of Lithography
5. Design and fabrication of customized illumination patterns for low k1 lithography: a diffractive approach,;Himel,2001