Author:
Silverman Jerome P.,Haelbich Rolf P.,Grobman Warren D.,Warlaumont John M.
Cited by
9 articles.
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1. Superconducting compact synchrotron light source;Electrical Engineering in Japan;1993
2. Diffraction effects in x-ray proximity printing;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1992-09
3. Radiation damage effects on bipolar and MOS devices in X-Ray lithography;Journal of Electronic Materials;1992-07
4. Synchrotron radiation damage study of lateral pnp transistors in x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1991-11
5. Radiation damage study of bipolar devices in x-ray lithography;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11