Layout verification and optimization based on flexible design rules

Author:

Yang Jie,Capodieci Luigi,Sylvester Dennis

Publisher

SPIE

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Physical, Electrical, and Reliability Considerations for Copper BEOL Layout Design Rules;Journal of Low Power Electronics and Applications;2018-06-14

2. DRE: A Framework for Early Co-Evaluation of Design Rules, Technology Choices, and Layout Methodologies;IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems;2012-09

3. Stat-LRC: statistical rules check for variational lithography;SPIE Proceedings;2010-03-11

4. Monitoring and characterization of metal-over-contact based edge-contour extraction measurement followed by electrical simulation;SPIE Proceedings;2010-03-11

5. Accurate Systematic Hot-Spot Scoring Method and Score-Based Fixing Guidance Generation;IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences;2009

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