Author:
Jeon Ji-Hyun,Kang Ji-Won,Oh Hye-Keun
Reference5 articles.
1. CNT pellicles: recent optimization and exposure results;Bekaert;Proc. SPIE,2023
2. Properties and performance of EUVL pellicle membranes
3. Mechanical stress induced by external forces in the extreme ultraviolet pellicle
4. Derk Brouns, “Pellicle HVM specifications,” http://ieuvi.org/TWG/Mask/2016/20160221/5_TWG_Specs_V1.pdf.
5. Fracture behavior and characterization of free-standing metal silicide thin film;Airat,2022