Lens heating challenges for negative tone develop layers with freeform illumination: a comparative study of experimental vs. simulated results-Reference-Cited by-同舟云学术

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Lens heating challenges for negative tone develop layers with freeform illumination: a comparative study of experimental vs. simulated results

Published:2012-03-01 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Halle Scott,Crouse Michael,Jiang Aiqin,van Dommelen Youri,Brunner Tim,Minghetti Blandine,Colburn Matt,Zhang Youping

Publisher

SPIE

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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