Fabricating high-quality Fresnel zone plates by efficiently eliminating redeposition based on focused ion beam-Reference-Cited by-同舟云学术

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Fabricating high-quality Fresnel zone plates by efficiently eliminating redeposition based on focused ion beam

Published:2019-08-19 Issue:08 Volume:58 Page:1
ISSN:0091-3286
Container-title:Optical Engineering
language:
Short-container-title:Opt. Eng.

Author:

Chen Jie¹,Wang Junhua¹,Ma Bangjun²,Wang Xiaolong²,Yuan Dengpeng²,Liao Junsheng²,Xu Min¹

Affiliation:

1. Fudan University, Shanghai Engineering Center of Ultra-Precision Optical Manufacturing, Shanghai

2. China Academy of Engineering Physics, Institute of Materials, Jiangyou

Publisher

SPIE-Intl Soc Optical Eng

Subject

General Engineering,Atomic and Molecular Physics, and Optics

Reference14 articles.

1. Fabrication of Fresnel zone plates by ion-beam lithography and application as objective lenses in extreme ultraviolet microscopy at 13 nm wavelength

2. X-ray zone plate fabrication using a focused ion beam

3. Systematic efficiency study of line-doubled zone plates

4. Atomic layer deposition frequency-multiplied Fresnel zone plates for hard x-rays focusing

5. 3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates

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