3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates

Author:

Sanli Umut Tunca1,Jiao Chengge2,Baluktsian Margarita1,Grévent Corinne1,Hahn Kersten3,Wang Yi3,Srot Vesna3,Richter Gunther1,Bykova Iuliia1,Weigand Markus1,Schütz Gisela1,Keskinbora Kahraman1ORCID

Affiliation:

1. Modern Magnetic Systems; Max Planck Institute for Intelligent Systems; Stuttgart 70569 Germany

2. Thermo Fisher Scientific; 5651 GG Eindhoven The Netherlands

3. Stuttgart Center for Electron Microscopy; Max Planck Institute for Solid State Research; Stuttgart 70569 Germany

Publisher

Wiley

Subject

General Physics and Astronomy,General Engineering,Biochemistry, Genetics and Molecular Biology (miscellaneous),General Materials Science,General Chemical Engineering,Medicine (miscellaneous)

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