Novel characterization method for MEMS devices
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SPIE
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Experimental construction of force- and frequency-response curves of nonlinear resonators;Chaos: An Interdisciplinary Journal of Nonlinear Science;2023-06-01
2. Design, Fabrication and Characterization of High-G Acceleration Sensors for Automotive Industry and Test Structures for the Process Characterization;2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2022-04-25
3. Determination of Parameters With Uncertainties for Quality Control in MEMS Fabrication;Journal of Microelectromechanical Systems;2013-06
4. Novel test structures for characterization of microsystems parameters at wafer level;SPIE Proceedings;2009-02-12
5. Fabrication and characterization of a force coupled sensor–actuator system for adjustable resonant low frequency vibration detection;Sensors and Actuators A: Physical;2008-07
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