Design, Fabrication and Characterization of High-G Acceleration Sensors for Automotive Industry and Test Structures for the Process Characterization-Reference-Cited by-同舟云学术

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Design, Fabrication and Characterization of High-G Acceleration Sensors for Automotive Industry and Test Structures for the Process Characterization

Published:2022-04-25 Issue: Volume: Page:
ISSN:
Container-title:2022 23rd International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)
language:
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Author:

Shaporin Alexey¹,Weidlich Sebastian²,Wunsch Dirk¹,Hahn Susann²,Forke Roman¹,Hiller Karla¹,Kuhn Harald¹

Affiliation:

1. Fraunhofer Institute for Electronic Nano Systems (ENAS),Chemnitz,Germany,09126

2. Chemnitz University of Technology,Center for Microtechnologies,Chemnitz,Germany,09126

Funder

European Regional Development Fund

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9758836/9758837/09758898.pdf?arnumber=9758898

Reference17 articles.

1. An Electrical-Stimulus-Only BIST IC for Capacitive MEMS Accelerometer Sensitivity Characterization

2. Asymmetric seesaw structure of microelectromechanical systems accelerometer for sensing out-off-plane acceleration

3. Out of plane capacitive transducer in air gap insulation microstructures technology for high precision monolithic 3-axis sensors;reuter;SSI 2012 - Smart Systems Integration Conference 2012,2012

4. A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

5. Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators

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