Modulated dark-field phasing detection for automatic optical inspection
Author:
Affiliation:
1. University of Arizona, James C. Wyant College of Optical Sciences, Tucson, Arizona
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference10 articles.
1. Design and application of industrial machine vision systems
2. A survey on industrial vision systems, applications and tools
3. Automatic optical inspection for detecting defects on printed circuit board inner layers
4. Automatic defect inspection of patterned thin film transistor-liquid crystal display (TFT-LCD) panels using one-dimensional Fourier reconstruction and wavelet decomposition
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