Scale spanning subnanometer metrology up to ten decades-Reference-Cited by-同舟云学术

Scale spanning subnanometer metrology up to ten decades

Published:2019-06-21 Issue: Volume: Page:
ISSN:
Container-title:Optical Measurement Systems for Industrial Inspection XI
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Author:

Manske Eberhard,Fröhlich Thomas,Füssl Roland,Mastylo Rostyslav,Blumröder Ulrike,Köchert Paul,Birli Oliver,Ortlepp Ingo,Pruss Christof,Schwesinger Folker,Meister Andreas

Publisher

SPIE

Reference21 articles.

1. How to drive optical measurement systems to outstanding performance

2. Kramar, J.A., “Nanometre resolution metrology with the Molecular Measuring Machine”, https://iopscience.iop.org/article/10.1088/0957-0233/16/11/001/meta.

3. Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology;Jäger;Surface Topography: Metrology Properties,2016

4. Optical Interferometry

5. Zygo, “Verifire Specifications”, https://www.zygo.com/?/met/interferometers/verifire/.

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