Ion beam figuring of SiC mirrors provides ultimate WFE performances for any type of telescope
Author:
Affiliation:
1. Matra Marconi Space (France)
2. Institute for Surface Modification (Germany)
Publisher
SPIE
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Thermal oxidation polishing of pressureless sintered silicon carbide;Ceramics International;2024-03
2. Characterization of an RF excited broad beam ion source operating with inert gases;Journal of Applied Physics;2021-06-14
3. The Basic Theory of Aspheric Optical Lapping and Polishing Technology;Large and Middle-Scale Aperture Aspheric Surfaces;2017-01-20
4. Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines;Journal of Synchrotron Radiation;2015-01-01
5. Ion Beam Figuring Technology;Handbook of Manufacturing Engineering and Technology;2014-09-30
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