Silicon wafer defect detection using high frequency guided waves-Reference-Cited by-同舟云学术

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Silicon wafer defect detection using high frequency guided waves

Published:2018-03-27 Issue: Volume: Page:
ISSN:
Container-title:Health Monitoring of Structural and Biological Systems XII
language:
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Author:

Fromme Paul,Masserey Bernard,Robyr Jean-Luc,Lauper Michael

Publisher

SPIE

Reference33 articles.

1. Luque, A. and Hegedus, S., [Handbook of Photovoltaic Science and Engineering], Wiley, New York (2011).

2. Review of Microcrack Detection Techniques for Silicon Solar Cells

3. Physical Science International Journal

4. Standing on the shoulders of giants: An example of guided wave inspection;Rose,2002

5. Monitoring of plate structures using guided ultrasonic waves;Fromme,2008

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Optical wafer defect inspection at the 10 nm technology node and beyond;International Journal of Extreme Manufacturing;2022-04-21

2. High-Frequency Guided Wave Propagation and Scattering in Silicon Wafers;Journal of Nondestructive Evaluation, Diagnostics and Prognostics of Engineering Systems;2021-06-01

3. Defect detection in monocrystalline silicon wafers using high frequency guided waves;AIP Conference Proceedings;2019

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