Author:
Chen Chih-Yu,Ng Philip C. W.,Liu Chun-Hung,Shen Yu-Tian,Tsai Kuen-Yu,Li Jia-Han,Shieh Jason J.,Chen Alek C.
Cited by
1 articles.
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1. Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts;Metrology, Inspection, and Process Control for Microlithography XXVIII;2014-04-02